VAMAS Surface Chemical Analysis Standard Data Transfer Format 1988 May 4
XI Ltd.
XI Spectral Data Processor
XI ASCII
FRESHLY EXPOSED BULK OF A SILICON WAFER (90 DEGREE TAKE-OFF-ANGLE)
1

NORM
REGULAR
5
0
0
0
0
0
5

FRESHLY EXPOSED BULK OF A SILICON WAFER (90 DEGREE TAKE-OFF-ANGLE)
2003
5
10
14
47
52
0
0
XPS
X-RAY Source
1486.6
200
250
1000
55
90
FAT
25
1
0
0
1000
2000
55
0
data_1
data_1
-1
Binding energy
eV
105
-0.0261097
2
counts
d
Transmission
d
pulse counting
0.2
300
4.00E-06
0
0
0
0
768
499
17849
0.312255
0.313609
932
0.313609
1024
0.313606
1042
0.313602
997
0.313598
993
0.313595
1014
0.313591
1000
0.313588
1018
0.313584
984
0.313581
977
0.313577
960
0.313574
1048
0.31357
1061
0.313566
1008
0.313563
972
0.313559
1048
0.313556
1067
0.313552
1018
0.313549
971
0.313545
1043
0.313542
1097
0.313538
1134
0.313534
1073
0.313531
1087
0.313527
1095
0.313524
1109
0.31352
1075
0.313517
1180
0.313513
1189
0.31351
1159
0.313506
1208
0.313502
1190
0.313499
1131
0.313495
1090
0.313492
1212
0.313488
1180
0.313485
1258
0.313481
1289
0.313478
1238
0.313474
1276
0.31347
1186
0.313467
1339
0.313463
1308
0.31346
1335
0.313456
1311
0.313453
1312
0.313449
1338
0.313446
1386
0.313442
1363
0.313438
1391
0.313435
1410
0.313431
1358
0.313428
1406
0.313424
1376
0.313421
1453
0.313417
1478
0.313414
1462
0.31341
1431
0.313407
1404
0.313403
1437
0.313399
1356
0.313396
1377
0.313392
1558
0.313389
1517
0.313385
1504
0.313382
1504
0.313378
1449
0.313375
1549
0.313371
1536
0.313368
1621
0.313364
1486
0.31336
1515
0.313357
1488
0.313353
1489
0.31335
1505
0.313346
1494
0.313343
1479
0.313339
1491
0.313336
1520
0.313332
1444
0.313328
1507
0.313325
1463
0.313321
1493
0.313318
1491
0.313314
1510
0.313311
1482
0.313307
1403
0.313304
1482
0.3133
1453
0.313297
1405
0.313293
1419
0.313289
1401
0.313286
1414
0.313282
1339
0.313279
1390
0.313275
1356
0.313272
1348
0.313268
1318
0.313265
1302
0.313261
1354
0.313258
1328
0.313254
1330
0.31325
1304
0.313247
1313
0.313243
1249
0.31324
1306
0.313236
1292
0.313233
1335
0.313229
1333
0.313226
1267
0.313222
1273
0.313219
1287
0.313215
1219
0.313211
1257
0.313208
1278
0.313204
1214
0.313201
1202
0.313197
1235
0.313194
1183
0.31319
1156
0.313187
1129
0.313183
1163
0.31318
1114
0.313176
1099
0.313172
1133
0.313169
1107
0.313165
1143
0.313162
1084
0.313158
1079
0.313155
1052
0.313151
1115
0.313148
1150
0.313144
1065
0.313141
1031
0.313137
1153
0.313134
1196
0.31313
1142
0.313126
1139
0.313123
1166
0.313119
1127
0.313116
1060
0.313112
1160
0.313109
1129
0.313105
1172
0.313102
1117
0.313098
1167
0.313095
1202
0.313091
1175
0.313087
1157
0.313084
1177
0.31308
1204
0.313077
1189
0.313073
1231
0.31307
1311
0.313066
1262
0.313063
1261
0.313059
1392
0.313056
1343
0.313052
1406
0.313049
1463
0.313045
1532
0.313041
1690
0.313038
1747
0.313034
1858
0.313031
1915
0.313027
2064
0.313024
2293
0.31302
2470
0.313017
2731
0.313013
2926
0.31301
3277
0.313006
3512
0.313003
3812
0.312999
4219
0.312995
4535
0.312992
5044
0.312988
5594
0.312985
6112
0.312981
6795
0.312978
7362
0.312974
7953
0.312971
8604
0.312967
9387
0.312964
9791
0.31296
10178
0.312957
10668
0.312953
10675
0.31295
10817
0.312946
10907
0.312942
10908
0.312939
10732
0.312935
10635
0.312932
10371
0.312928
10062
0.312925
10037
0.312921
10001
0.312918
9742
0.312914
9924
0.312911
10275
0.312907
10655
0.312904
11401
0.3129
12051
0.312896
13036
0.312893
13988
0.312889
14957
0.312886
15711
0.312882
16361
0.312879
16917
0.312875
17501
0.312872
17622
0.312868
17849
0.312865
17502
0.312861
16778
0.312858
15990
0.312854
14918
0.312851
13739
0.312847
12423
0.312843
11120
0.31284
9823
0.312836
8324
0.312833
7357
0.312829
6192
0.312826
5259
0.312822
4267
0.312819
3542
0.312815
3059
0.312812
2465
0.312808
2114
0.312805
1822
0.312801
1615
0.312798
1483
0.312794
1228
0.31279
1166
0.312787
1038
0.312783
1046
0.31278
970
0.312776
859
0.312773
841
0.312769
775
0.312766
769
0.312762
731
0.312759
677
0.312755
664
0.312752
646
0.312748
618
0.312745
631
0.312741
653
0.312738
652
0.312734
633
0.31273
613
0.312727
629
0.312723
624
0.31272
574
0.312716
565
0.312713
575
0.312709
562
0.312706
544
0.312702
558
0.312699
521
0.312695
534
0.312692
546
0.312688
564
0.312685
578
0.312681
557
0.312678
553
0.312674
499
0.31267
567
0.312667
566
0.312663
544
0.31266
530
0.312656
507
0.312653
524
0.312649
529
0.312646
530
0.312642
531
0.312639
503
0.312635
536
0.312632
531
0.312628
541
0.312625
560
0.312621
564
0.312618
533
0.312614
528
0.312611
570
0.312607
534
0.312603
515
0.3126
600
0.312596
542
0.312593
610
0.312589
608
0.312586
603
0.312582
608
0.312579
612
0.312575
592
0.312572
620
0.312568
549
0.312565
560
0.312561
584
0.312558
611
0.312554
608
0.312551
585
0.312547
621
0.312544
652
0.31254
562
0.312537
592
0.312533
615
0.312529
585
0.312526
571
0.312522
592
0.312519
615
0.312515
617
0.312512
621
0.312508
614
0.312505
581
0.312501
602
0.312498
678
0.312494
687
0.312491
670
0.312487
670
0.312484
663
0.31248
638
0.312477
585
0.312473
665
0.31247
688
0.312466
677
0.312463
653
0.312459
679
0.312455
657
0.312452
656
0.312448
653
0.312445
667
0.312441
601
0.312438
646
0.312434
641
0.312431
699
0.312427
713
0.312424
671
0.31242
695
0.312417
678
0.312413
708
0.31241
714
0.312406
695
0.312403
678
0.312399
692
0.312396
708
0.312392
683
0.312389
643
0.312385
656
0.312382
677
0.312378
701
0.312375
643
0.312371
653
0.312367
695
0.312364
660
0.31236
694
0.312357
710
0.312353
666
0.31235
636
0.312346
670
0.312343
733
0.312339
718
0.312336
705
0.312332
699
0.312329
677
0.312325
696
0.312322
689
0.312318
708
0.312315
667
0.312311
661
0.312308
677
0.312304
682
0.312301
762
0.312297
724
0.312294
677
0.31229
612
0.312287
701
0.312283
645
0.31228
632
0.312276
698
0.312273
678
0.312269
696
0.312266
718
0.312262
661
0.312258
643
0.312255

FRESHLY EXPOSED BULK OF A SILICON WAFER (90 DEGREE TAKE-OFF-ANGLE)
2003
5
10
14
47
52
0
0
XPS
X-RAY Source
1486.6
200
250
1000
55
90
FAT
50
1
0
10
1000
2000
55
0
data_2
data_2
-1
Binding energy
eV
1000
-0.977517
2
counts
d
Transmission
d
pulse counting
0.2
20
4.00E-06
0
0
0
0
2048
107
14426
0.300125
0.586563
3129
0.586563
3173
0.585857
3066
0.585154
2906
0.584452
2858
0.583753
2832
0.583056
2768
0.582362
2754
0.581669
2767
0.580979
2638
0.580291
2683
0.579605
2738
0.578921
2736
0.578239
2694
0.57756
2774
0.576883
2902
0.576207
2896
0.575534
3091
0.574863
3425
0.574194
3421
0.573527
3774
0.572862
3841
0.5722
4017
0.571539
3890
0.57088
3426
0.570223
3198
0.569569
2996
0.568916
2791
0.568265
2627
0.567617
2484
0.56697
2381
0.566325
2202
0.565682
2065
0.565041
2007
0.564402
1987
0.563765
1904
0.56313
1931
0.562497
1886
0.561866
1895
0.561236
1901
0.560609
1882
0.559983
1872
0.559359
1890
0.558737
1784
0.558117
1857
0.557499
1852
0.556882
1859
0.556268
1861
0.555655
1896
0.555044
1783
0.554434
1757
0.553827
1807
0.553221
1902
0.552617
1966
0.552015
1841
0.551415
1853
0.550816
1829
0.550219
1833
0.549624
1826
0.54903
1865
0.548438
1838
0.547848
1831
0.54726
1811
0.546673
1917
0.546088
1820
0.545504
1879
0.544922
1858
0.544342
1853
0.543764
1842
0.543187
1888
0.542612
1907
0.542038
1836
0.541466
1824
0.540896
1798
0.540327
1838
0.53976
1915
0.539194
1900
0.53863
1878
0.538068
1871
0.537507
1849
0.536948
1865
0.53639
1876
0.535834
1864
0.535279
1996
0.534726
1814
0.534174
1878
0.533624
1894
0.533075
1902
0.532528
1910
0.531983
1827
0.531438
1870
0.530896
1841
0.530355
1927
0.529815
1890
0.529277
1869
0.52874
1976
0.528204
1852
0.527671
1843
0.527138
1968
0.526607
1834
0.526077
1924
0.525549
1958
0.525022
1843
0.524497
1903
0.523973
1930
0.52345
1941
0.522929
1909
0.522409
1800
0.521891
1913
0.521374
1870
0.520858
1992
0.520344
1981
0.519831
1981
0.519319
1889
0.518809
1937
0.5183
1972
0.517792
1919
0.517286
1860
0.516781
1969
0.516277
1860
0.515775
1895
0.515274
1930
0.514774
1971
0.514276
1926
0.513778
1883
0.513282
1945
0.512788
1876
0.512294
1958
0.511802
1882
0.511311
1968
0.510822
2008
0.510333
1915
0.509846
2000
0.50936
1927
0.508876
1944
0.508392
1941
0.50791
2018
0.507429
1916
0.506949
1879
0.506471
1924
0.505993
1920
0.505517
1937
0.505042
2064
0.504569
1921
0.504096
1912
0.503625
1953
0.503154
1949
0.502685
1895
0.502217
1963
0.501751
1951
0.501285
1933
0.500821
1938
0.500357
1987
0.499895
1994
0.499434
1978
0.498974
1920
0.498515
1948
0.498058
1965
0.497601
1889
0.497146
1987
0.496692
1940
0.496238
2051
0.495786
1993
0.495335
1990
0.494885
1930
0.494437
1987
0.493989
1934
0.493542
2012
0.493097
2054
0.492652
1987
0.492209
1998
0.491766
2014
0.491325
2007
0.490885
1914
0.490445
1961
0.490007
1973
0.48957
2021
0.489134
1994
0.488699
2109
0.488265
2045
0.487832
1926
0.4874
2082
0.486969
2026
0.486539
2018
0.48611
2092
0.485682
2043
0.485255
2012
0.48483
1983
0.484405
1971
0.483981
2011
0.483558
2081
0.483136
1991
0.482715
2042
0.482295
2064
0.481876
2066
0.481458
1989
0.481041
2032
0.480624
1934
0.480209
2012
0.479795
2059
0.479382
2055
0.47897
2018
0.478558
2087
0.478148
2010
0.477738
2088
0.47733
2028
0.476922
2104
0.476515
2028
0.47611
1974
0.475705
2059
0.475301
2129
0.474898
2105
0.474496
2138
0.474094
2045
0.473694
2037
0.473295
2128
0.472896
2075
0.472499
2016
0.472102
1998
0.471706
2084
0.471311
2160
0.470917
2028
0.470524
2105
0.470131
2079
0.46974
2142
0.469349
2063
0.46896
2027
0.468571
2102
0.468183
2045
0.467796
2053
0.467409
2076
0.467024
2121
0.466639
2112
0.466256
2024
0.465873
2028
0.465491
2103
0.465109
2111
0.464729
2113
0.464349
2161
0.463971
2084
0.463593
2208
0.463215
2088
0.462839
2133
0.462464
2145
0.462089
2159
0.461715
2128
0.461342
2155
0.46097
2171
0.460598
2102
0.460228
2038
0.459858
2072
0.459489
2129
0.459121
2183
0.458753
2070
0.458386
2075
0.45802
2195
0.457655
2138
0.457291
2228
0.456927
2144
0.456564
2042
0.456202
2084
0.455841
2060
0.455481
2128
0.455121
2186
0.454762
2160
0.454403
2122
0.454046
2178
0.453689
2143
0.453333
2085
0.452978
2094
0.452623
2172
0.452269
2185
0.451916
2231
0.451564
2086
0.451213
2076
0.450862
2134
0.450511
2182
0.450162
2192
0.449813
2221
0.449465
2140
0.449118
2143
0.448772
2181
0.448426
2100
0.448081
2106
0.447736
2123
0.447393
2142
0.44705
2189
0.446707
2136
0.446366
2219
0.446025
2192
0.445684
2180
0.445345
2158
0.445006
2252
0.444668
2160
0.44433
2166
0.443994
2231
0.443658
2161
0.443322
2175
0.442987
2188
0.442653
2159
0.44232
2198
0.441987
2183
0.441655
2205
0.441324
2092
0.440993
2223
0.440663
2136
0.440333
2238
0.440005
2195
0.439676
2194
0.439349
2258
0.439022
2174
0.438696
2233
0.438371
2238
0.438046
2198
0.437721
2313
0.437398
2204
0.437075
2195
0.436752
2235
0.436431
2241
0.43611
2300
0.435789
2275
0.435469
2202
0.43515
2192
0.434832
2188
0.434514
2220
0.434196
2232
0.43388
2257
0.433564
2252
0.433248
2347
0.432933
2324
0.432619
2233
0.432305
2240
0.431992
2318
0.43168
2337
0.431368
2310
0.431057
2210
0.430746
2218
0.430436
2338
0.430127
2296
0.429818
2323
0.42951
2221
0.429202
2363
0.428895
2253
0.428588
2345
0.428282
2298
0.427977
2244
0.427672
2287
0.427368
2351
0.427065
2236
0.426762
2333
0.426459
2272
0.426157
2379
0.425856
2296
0.425555
2365
0.425255
2369
0.424955
2354
0.424656
2303
0.424358
2326
0.42406
2332
0.423762
2334
0.423466
2387
0.423169
2377
0.422874
2332
0.422579
2436
0.422284
2382
0.42199
2391
0.421696
2344
0.421403
2415
0.421111
2388
0.420819
2469
0.420528
2454
0.420237
2436
0.419946
2372
0.419657
2407
0.419368
2443
0.419079
2426
0.418791
2344
0.418503
2364
0.418216
2394
0.417929
2357
0.417643
2388
0.417358
2417
0.417073
2428
0.416788
2420
0.416504
2368
0.416221
2407
0.415938
2453
0.415655
2469
0.415373
2431
0.415092
2434
0.414811
2547
0.414531
2384
0.414251
2438
0.413971
2471
0.413693
2535
0.413414
2426
0.413136
2447
0.412859
2547
0.412582
2478
0.412305
2583
0.41203
2423
0.411754
2506
0.411479
2444
0.411205
2488
0.410931
2525
0.410657
2484
0.410384
2555
0.410112
2542
0.40984
2587
0.409568
2474
0.409297
2604
0.409027
2522
0.408757
2555
0.408487
2601
0.408218
2531
0.407949
2558
0.407681
2634
0.407413
2619
0.407146
2642
0.406879
2490
0.406613
2609
0.406347
2592
0.406081
2596
0.405816
2624
0.405552
2598
0.405288
2573
0.405024
2692
0.404761
2695
0.404499
2674
0.404236
2670
0.403975
2670
0.403713
2748
0.403452
2670
0.403192
2587
0.402932
2733
0.402673
2650
0.402414
2704
0.402155
2736
0.401897
2680
0.401639
2735
0.401382
2882
0.401125
2729
0.400868
2795
0.400612
2796
0.400357
2702
0.400102
2789
0.399847
2785
0.399593
2803
0.399339
2900
0.399086
2859
0.398833
2970
0.39858
2919
0.398328
2984
0.398076
2867
0.397825
3029
0.397574
3068
0.397324
2962
0.397074
2995
0.396824
2953
0.396575
2899
0.396326
2917
0.396078
2786
0.39583
2811
0.395583
2828
0.395335
2813
0.395089
2694
0.394843
2724
0.394597
2539
0.394351
2592
0.394106
2487
0.393862
2490
0.393617
2614
0.393374
2496
0.39313
2545
0.392887
2579
0.392644
2753
0.392402
3379
0.39216
6750
0.391919
12399
0.391678
9134
0.391437
3098
0.391197
2353
0.390957
2245
0.390718
2335
0.390479
2242
0.39024
2237
0.390002
2289
0.389764
2238
0.389526
2288
0.389289
2274
0.389052
2199
0.388816
2192
0.38858
2234
0.388344
2184
0.388109
2304
0.387874
2269
0.38764
2254
0.387406
2386
0.387172
2255
0.386939
2285
0.386706
2301
0.386473
2302
0.386241
2308
0.386009
2220
0.385778
2211
0.385547
2261
0.385316
2245
0.385086
2277
0.384856
2109
0.384626
2202
0.384397
2224
0.384168
2210
0.383939
2210
0.383711
2240
0.383483
2258
0.383256
2315
0.383029
2305
0.382802
2188
0.382576
2248
0.38235
2345
0.382124
2263
0.381899
2286
0.381674
2283
0.381449
2245
0.381225
2400
0.381001
2329
0.380777
2268
0.380554
2263
0.380331
2322
0.380109
2289
0.379887
2347
0.379665
2259
0.379443
2276
0.379222
2275
0.379001
2291
0.378781
2343
0.378561
2297
0.378341
2265
0.378122
2318
0.377903
2271
0.377684
2195
0.377465
2298
0.377247
2351
0.37703
2311
0.376812
2203
0.376595
2378
0.376379
2365
0.376162
2253
0.375946
2281
0.37573
2276
0.375515
2301
0.3753
2293
0.375085
2253
0.374871
2345
0.374657
2283
0.374443
2343
0.374229
2345
0.374016
2298
0.373803
2284
0.373591
2262
0.373379
2359
0.373167
2363
0.372956
2311
0.372744
2291
0.372533
2288
0.372323
2332
0.372113
2270
0.371903
2302
0.371693
2352
0.371484
2311
0.371275
2409
0.371066
2356
0.370858
2301
0.37065
2426
0.370442
2422
0.370235
2277
0.370028
2345
0.369821
2328
0.369614
2344
0.369408
2362
0.369202
2329
0.368997
2365
0.368791
2368
0.368586
2386
0.368382
2274
0.368177
2396
0.367973
2265
0.36777
2307
0.367566
2361
0.367363
2346
0.36716
2420
0.366958
2433
0.366755
2404
0.366553
2315
0.366352
2358
0.36615
2420
0.365949
2314
0.365749
2431
0.365548
2373
0.365348
2377
0.365148
2342
0.364948
2384
0.364749
2444
0.36455
2395
0.364351
2375
0.364153
2461
0.363955
2324
0.363757
2340
0.363559
2434
0.363362
2322
0.363165
2445
0.362968
2473
0.362772
2508
0.362576
2535
0.36238
2498
0.362184
2392
0.361989
2333
0.361794
2368
0.361599
2401
0.361404
2488
0.36121
2387
0.361016
2417
0.360823
2398
0.360629
2410
0.360436
2443
0.360243
2420
0.360051
2446
0.359859
2385
0.359667
2453
0.359475
2457
0.359283
2327
0.359092
2422
0.358901
2518
0.358711
2447
0.35852
2368
0.35833
2416
0.35814
2392
0.357951
2416
0.357762
2450
0.357573
2529
0.357384
2510
0.357195
2416
0.357007
2453
0.356819
2415
0.356631
2432
0.356444
2379
0.356257
2556
0.35607
2476
0.355883
2448
0.355697
2443
0.355511
2477
0.355325
2494
0.355139
2545
0.354954
2443
0.354769
2396
0.354584
2438
0.354399
2438
0.354215
2464
0.354031
2511
0.353847
2444
0.353664
2517
0.35348
2498
0.353297
2418
0.353114
2546
0.352932
2459
0.352749
2534
0.352567
2491
0.352386
2578
0.352204
2404
0.352023
2490
0.351842
2548
0.351661
2497
0.35148
2522
0.3513
2456
0.35112
2575
0.35094
2453
0.350761
2530
0.350581
2516
0.350402
2407
0.350223
2486
0.350045
2564
0.349866
2576
0.349688
2493
0.34951
2517
0.349333
2544
0.349155
2627
0.348978
2592
0.348801
2586
0.348625
2549
0.348448
2626
0.348272
2576
0.348096
2585
0.34792
2638
0.347745
2622
0.34757
2571
0.347395
2660
0.34722
2753
0.347045
2510
0.346871
2658
0.346697
2685
0.346523
2692
0.34635
2694
0.346176
2666
0.346003
2616
0.34583
2596
0.345657
2603
0.345485
2615
0.345313
2648
0.345141
2682
0.344969
2700
0.344797
2690
0.344626
2699
0.344455
2757
0.344284
2761
0.344113
2672
0.343943
2736
0.343773
2652
0.343603
2707
0.343433
2665
0.343264
2626
0.343094
2670
0.342925
2615
0.342756
2569
0.342588
2608
0.342419
2518
0.342251
2648
0.342083
2783
0.341916
2779
0.341748
2795
0.341581
3097
0.341414
3842
0.341247
6394
0.34108
4810
0.340914
2642
0.340747
2555
0.340581
2613
0.340416
2670
0.34025
2531
0.340085
2592
0.33992
2682
0.339755
2533
0.33959
2690
0.339425
2603
0.339261
2593
0.339097
2633
0.338933
2603
0.33877
2586
0.338606
2644
0.338443
2597
0.33828
2605
0.338117
2656
0.337954
2617
0.337792
2675
0.33763
2599
0.337468
2718
0.337306
2598
0.337144
2695
0.336983
2711
0.336822
2692
0.336661
2704
0.3365
2621
0.33634
2759
0.336179
2695
0.336019
2651
0.335859
2699
0.3357
2792
0.33554
2722
0.335381
2651
0.335222
2652
0.335063
2620
0.334904
2767
0.334745
2736
0.334587
2710
0.334429
2682
0.334271
2823
0.334113
2861
0.333956
2747
0.333798
2768
0.333641
2760
0.333484
2907
0.333328
2849
0.333171
2843
0.333015
2839
0.332859
2833
0.332703
2922
0.332547
2906
0.332391
2868
0.332236
2868
0.332081
2883
0.331926
2880
0.331771
2923
0.331616
2947
0.331462
3009
0.331308
3063
0.331154
2960
0.331
3090
0.330846
3090
0.330693
2987
0.33054
3118
0.330386
3002
0.330234
3032
0.330081
3066
0.329928
3018
0.329776
3063
0.329624
3013
0.329472
3053
0.32932
2964
0.329169
3055
0.329017
3012
0.328866
3077
0.328715
3306
0.328564
3161
0.328414
3241
0.328263
3282
0.328113
3313
0.327963
3341
0.327813
3354
0.327663
3430
0.327513
3340
0.327364
3338
0.327215
3281
0.327066
3254
0.326917
3311
0.326768
3268
0.32662
3239
0.326472
3281
0.326324
3234
0.326176
3297
0.326028
3477
0.32588
3450
0.325733
3540
0.325586
3762
0.325439
3827
0.325292
3845
0.325145
3815
0.324999
3727
0.324852
3780
0.324706
3548
0.32456
3409
0.324414
3315
0.324269
3235
0.324123
3240
0.323978
3190
0.323833
3261
0.323688
3342
0.323543
3390
0.323399
3481
0.323254
3575
0.32311
4039
0.322966
4291
0.322822
4803
0.322678
5190
0.322535
5051
0.322391
4309
0.322248
3762
0.322105
3477
0.321962
3061
0.321819
2898
0.321677
2788
0.321534
2730
0.321392
2614
0.32125
2688
0.321108
2594
0.320967
2603
0.320825
2775
0.320684
3176
0.320543
3508
0.320401
4040
0.320261
7161
0.32012
14426
0.319979
6268
0.319839
2848
0.319699
2193
0.319559
2007
0.319419
1811
0.319279
1746
0.31914
1784
0.319
1764
0.318861
1797
0.318722
1736
0.318583
1860
0.318444
1882
0.318306
1953
0.318167
2052
0.318029
2155
0.317891
2171
0.317753
2258
0.317615
2275
0.317477
2063
0.31734
1973
0.317203
1771
0.317065
1727
0.316928
1682
0.316792
1590
0.316655
1538
0.316518
1546
0.316382
1611
0.316246
1678
0.31611
1685
0.315974
1800
0.315838
1905
0.315702
2163
0.315567
2637
0.315432
3131
0.315297
3255
0.315162
2746
0.315027
2171
0.314892
1645
0.314758
1279
0.314623
1184
0.314489
1168
0.314355
987
0.314221
1022
0.314087
971
0.313954
901
0.31382
872
0.313687
824
0.313554
1138
0.313421
1422
0.313288
1220
0.313155
1589
0.313023
10475
0.31289
9285
0.312758
451
0.312626
293
0.312494
221
0.312362
253
0.312231
244
0.312099
230
0.311968
222
0.311837
240
0.311705
233
0.311575
237
0.311444
248
0.311313
212
0.311183
226
0.311052
245
0.310922
235
0.310792
238
0.310662
240
0.310533
216
0.310403
247
0.310273
240
0.310144
246
0.310015
231
0.309886
284
0.309757
255
0.309628
237
0.3095
270
0.309371
227
0.309243
280
0.309115
259
0.308987
271
0.308859
256
0.308731
279
0.308603
245
0.308476
266
0.308349
272
0.308221
261
0.308094
252
0.307967
273
0.307841
235
0.307714
282
0.307588
281
0.307461
288
0.307335
257
0.307209
268
0.307083
271
0.306957
274
0.306832
254
0.306706
239
0.306581
238
0.306455
269
0.30633
250
0.306205
284
0.30608
270
0.305956
263
0.305831
274
0.305707
309
0.305582
287
0.305458
284
0.305334
303
0.30521
271
0.305087
298
0.304963
289
0.304839
283
0.304716
291
0.304593
265
0.30447
302
0.304347
283
0.304224
298
0.304101
276
0.303979
338
0.303856
319
0.303734
334
0.303612
395
0.30349
419
0.303368
409
0.303246
475
0.303124
446
0.303003
341
0.302881
314
0.30276
324
0.302639
278
0.302518
310
0.302397
264
0.302276
268
0.302156
215
0.302035
236
0.301915
294
0.301795
266
0.301674
308
0.301554
366
0.301435
386
0.301315
321
0.301195
374
0.301076
410
0.300956
323
0.300837
284
0.300718
281
0.300599
319
0.30048
288
0.300362
162
0.300243
107
0.300125

FRESHLY EXPOSED BULK OF A SILICON WAFER (90 DEGREE TAKE-OFF-ANGLE)
2003
5
10
14
47
54
0
0
XPS
X-RAY Source
1486.6
200
250
1000
55
90
FAT
150
1
0
0
1000
2000
55
0
data_3
data_3
-1
Binding energy
eV
50
-0.196078
2
counts
d
Transmission
d
pulse counting
0.2
40
4.00E-06
0
0
0
0
512
381
4267
0.300125
0.306349
2186
0.306349
2224
0.306324
2174
0.306299
2131
0.306274
2139
0.306249
2227
0.306224
2182
0.306199
2245
0.306174
2297
0.306148
2268
0.306123
2215
0.306098
2217
0.306073
2200
0.306048
2254
0.306023
2336
0.305998
2350
0.305973
2285
0.305948
2309
0.305923
2322
0.305898
2235
0.305873
2278
0.305848
2265
0.305823
2323
0.305798
2281
0.305773
2286
0.305748
2294
0.305724
2451
0.305699
2434
0.305674
2389
0.305649
2387
0.305624
2328
0.305599
2431
0.305574
2397
0.305549
2361
0.305524
2306
0.305499
2351
0.305474
2389
0.305449
2406
0.305424
2454
0.3054
2407
0.305375
2378
0.30535
2493
0.305325
2411
0.3053
2396
0.305275
2449
0.30525
2307
0.305226
2333
0.305201
2414
0.305176
2317
0.305151
2399
0.305126
2346
0.305101
2405
0.305077
2377
0.305052
2298
0.305027
2448
0.305002
2359
0.304977
2379
0.304953
2405
0.304928
2361
0.304903
2278
0.304878
2352
0.304854
2365
0.304829
2326
0.304804
2323
0.304779
2296
0.304755
2375
0.30473
2370
0.304705
2194
0.30468
2125
0.304656
2275
0.304631
2255
0.304606
2228
0.304581
2366
0.304557
2285
0.304532
2234
0.304507
2240
0.304483
2189
0.304458
2192
0.304433
2199
0.304409
2214
0.304384
2151
0.304359
2207
0.304335
2263
0.30431
2296
0.304285
2205
0.304261
2221
0.304236
2248
0.304212
2244
0.304187
2265
0.304162
2287
0.304138
2297
0.304113
2296
0.304088
2336
0.304064
2425
0.304039
2419
0.304015
2502
0.30399
2518
0.303966
2538
0.303941
2550
0.303916
2582
0.303892
2540
0.303867
2601
0.303843
2704
0.303818
2811
0.303794
2755
0.303769
2763
0.303745
2977
0.30372
2894
0.303696
3008
0.303671
3023
0.303647
3224
0.303622
3266
0.303598
3192
0.303573
3475
0.303549
3501
0.303524
3586
0.3035
3705
0.303475
3726
0.303451
3921
0.303426
3926
0.303402
3999
0.303377
4130
0.303353
4133
0.303328
4212
0.303304
4145
0.30328
4240
0.303255
4231
0.303231
4267
0.303206
4122
0.303182
4074
0.303158
3984
0.303133
3893
0.303109
3716
0.303084
3643
0.30306
3461
0.303036
3281
0.303011
3224
0.302987
3031
0.302963
2951
0.302938
2818
0.302914
2677
0.30289
2654
0.302865
2653
0.302841
2628
0.302817
2630
0.302792
2535
0.302768
2553
0.302744
2442
0.302719
2494
0.302695
2459
0.302671
2553
0.302646
2503
0.302622
2421
0.302598
2453
0.302574
2355
0.302549
2374
0.302525
2416
0.302501
2294
0.302477
2257
0.302452
2235
0.302428
2238
0.302404
2237
0.30238
2087
0.302355
1973
0.302331
1999
0.302307
1933
0.302283
1958
0.302258
1969
0.302234
1822
0.30221
1902
0.302186
1768
0.302162
1850
0.302138
1875
0.302113
1884
0.302089
1837
0.302065
1773
0.302041
1831
0.302017
1926
0.301993
1918
0.301968
2008
0.301944
2019
0.30192
2069
0.301896
2141
0.301872
2171
0.301848
2183
0.301824
2241
0.3018
2268
0.301775
2307
0.301751
2285
0.301727
2358
0.301703
2477
0.301679
2527
0.301655
2543
0.301631
2631
0.301607
2694
0.301583
2831
0.301559
2773
0.301535
3039
0.301511
3045
0.301487
3058
0.301463
3060
0.301439
3126
0.301414
3076
0.30139
3118
0.301366
3019
0.301342
3066
0.301318
3052
0.301294
3017
0.30127
2984
0.301246
2957
0.301222
3015
0.301198
3012
0.301174
3081
0.301151
3095
0.301127
3298
0.301103
3516
0.301079
3552
0.301055
3372
0.301031
3402
0.301007
3321
0.300983
3098
0.300959
2943
0.300935
2813
0.300911
2542
0.300887
2446
0.300863
2303
0.300839
2267
0.300815
2246
0.300792
2204
0.300768
2111
0.300744
2132
0.30072
2199
0.300696
2313
0.300672
2362
0.300648
2417
0.300624
2457
0.300601
2455
0.300577
2510
0.300553
2573
0.300529
2447
0.300505
2360
0.300481
2331
0.300458
2246
0.300434
2153
0.30041
2004
0.300386
1822
0.300362
1674
0.300339
1471
0.300315
1203
0.300291
980
0.300267
814
0.300243
712
0.30022
605
0.300196
467
0.300172
382
0.300148
381
0.300125

FRESHLY EXPOSED BULK OF A SILICON WAFER (90 DEGREE TAKE-OFF-ANGLE)
2003
5
10
14
47
54
0
0
XPS
X-RAY Source
1486.6
200
250
1000
55
90
FAT
50
1
0
0
1000
2000
55
0
data_4
data_4
-1
Binding energy
eV
540
-0.0784314
2
counts
d
Transmission
d
pulse counting
0.2
40
4.00E-06
0
0
0
0
512
3024
18221
0.388571
0.393476
3567
0.393476
3689
0.393456
3680
0.393437
3562
0.393417
3638
0.393398
3735
0.393378
3674
0.393359
3552
0.393339
3753
0.393319
3764
0.3933
3579
0.39328
3592
0.393261
3624
0.393241
3702
0.393222
3732
0.393202
3628
0.393183
3618
0.393163
3742
0.393144
3675
0.393124
3643
0.393105
3628
0.393085
3733
0.393066
3574
0.393046
3644
0.393027
3744
0.393007
3688
0.392988
3569
0.392968
3602
0.392949
3516
0.392929
3601
0.39291
3620
0.39289
3595
0.392871
3649
0.392851
3604
0.392832
3574
0.392812
3645
0.392793
3636
0.392773
3575
0.392754
3461
0.392734
3525
0.392715
3551
0.392695
3638
0.392676
3588
0.392657
3614
0.392637
3651
0.392618
3645
0.392598
3647
0.392579
3632
0.392559
3665
0.39254
3689
0.39252
3577
0.392501
3623
0.392482
3581
0.392462
3697
0.392443
3646
0.392423
3678
0.392404
3722
0.392384
3769
0.392365
3692
0.392346
3714
0.392326
3942
0.392307
3892
0.392287
4091
0.392268
4141
0.392249
4263
0.392229
4243
0.39221
4427
0.39219
4510
0.392171
4806
0.392152
4906
0.392132
5151
0.392113
5391
0.392094
5631
0.392074
6015
0.392055
6322
0.392035
6689
0.392016
6956
0.391997
7524
0.391977
8244
0.391958
8827
0.391939
9416
0.391919
9888
0.3919
10817
0.391881
11369
0.391861
12233
0.391842
12879
0.391822
13713
0.391803
14416
0.391784
15077
0.391764
15698
0.391745
16259
0.391726
17077
0.391706
17540
0.391687
17783
0.391668
18013
0.391649
18221
0.391629
18097
0.39161
18055
0.391591
17627
0.391571
17172
0.391552
16545
0.391533
15873
0.391513
14966
0.391494
14169
0.391475
12994
0.391455
12042
0.391436
10982
0.391417
9802
0.391398
8927
0.391378
8117
0.391359
7189
0.39134
6424
0.39132
5797
0.391301
5350
0.391282
4841
0.391263
4467
0.391243
4228
0.391224
4122
0.391205
3933
0.391186
3852
0.391166
3748
0.391147
3542
0.391128
3542
0.391109
3538
0.391089
3531
0.39107
3410
0.391051
3330
0.391032
3469
0.391012
3290
0.390993
3324
0.390974
3354
0.390955
3280
0.390935
3317
0.390916
3404
0.390897
3271
0.390878
3270
0.390859
3312
0.390839
3289
0.39082
3206
0.390801
3254
0.390782
3235
0.390762
3251
0.390743
3252
0.390724
3253
0.390705
3125
0.390686
3200
0.390666
3187
0.390647
3188
0.390628
3245
0.390609
3193
0.39059
3212
0.390571
3232
0.390551
3205
0.390532
3289
0.390513
3296
0.390494
3249
0.390475
3101
0.390456
3136
0.390436
3199
0.390417
3170
0.390398
3177
0.390379
3333
0.39036
3179
0.390341
3228
0.390321
3139
0.390302
3264
0.390283
3212
0.390264
3213
0.390245
3189
0.390226
3209
0.390207
3186
0.390188
3200
0.390168
3286
0.390149
3211
0.39013
3233
0.390111
3179
0.390092
3273
0.390073
3232
0.390054
3100
0.390035
3173
0.390015
3177
0.389996
3195
0.389977
3249
0.389958
3221
0.389939
3157
0.38992
3242
0.389901
3243
0.389882
3199
0.389863
3219
0.389844
3190
0.389825
3182
0.389805
3281
0.389786
3231
0.389767
3186
0.389748
3199
0.389729
3139
0.38971
3212
0.389691
3153
0.389672
3097
0.389653
3186
0.389634
3130
0.389615
3144
0.389596
3120
0.389577
3190
0.389558
3160
0.389539
3142
0.38952
3226
0.389501
3159
0.389481
3176
0.389462
3118
0.389443
3189
0.389424
3203
0.389405
3228
0.389386
3156
0.389367
3115
0.389348
3244
0.389329
3185
0.38931
3173
0.389291
3247
0.389272
3170
0.389253
3214
0.389234
3196
0.389215
3277
0.389196
3158
0.389177
3208
0.389158
3247
0.389139
3193
0.38912
3221
0.389101
3140
0.389082
3123
0.389063
3108
0.389044
3024
0.389025
3148
0.389006
3137
0.388987
3188
0.388968
3062
0.388949
3176
0.38893
3108
0.388912
3166
0.388893
3156
0.388874
3204
0.388855
3182
0.388836
3274
0.388817
3170
0.388798
3203
0.388779
3096
0.38876
3198
0.388741
3131
0.388722
3184
0.388703
3200
0.388684
3071
0.388665
3138
0.388646
3174
0.388627
3230
0.388608
3239
0.38859
3273
0.388571

FRESHLY EXPOSED BULK OF A SILICON WAFER (90 DEGREE TAKE-OFF-ANGLE)
2003
5
10
14
47
54
0
0
XPS
X-RAY Source
1486.6
200
250
1000
55
90
FAT
25
1
0
0
1000
2000
55
0
data_5
data_5
-1
Binding energy
eV
3
-0.023622
2
counts
d
Transmission
d
pulse counting
0.2
1
4.00E-06
0
0
0
0
256
0
3.21
0.300125
0.300489
0
0.300489
0
0.300486
0
0.300483
0
0.30048
0
0.300477
0
0.300474
0
0.300471
0
0.300468
0
0.300466
0
0.300463
0
0.30046
0
0.300457
0
0.300454
0
0.300451
0
0.300448
0
0.300445
0
0.300443
0
0.30044
0
0.300437
0
0.300434
0
0.300431
0
0.300428
0
0.300425
0
0.300423
0
0.30042
0
0.300417
0
0.300414
0
0.300411
0
0.300408
0
0.300405
0
0.300402
0
0.3004
0
0.300397
0
0.300394
0
0.300391
0
0.300388
0
0.300385
0
0.300382
0
0.30038
2.114
0.300377
0
0.300374
0
0.300371
0
0.300368
0
0.300365
0
0.300362
0
0.300359
0
0.300357
0
0.300354
0
0.300351
0
0.300348
0
0.300345
3.21
0.300342
0
0.300339
0
0.300336
0
0.300334
0
0.300331
0
0.300328
0
0.300325
0
0.300322
0
0.300319
0
0.300316
0
0.300314
0
0.300311
0
0.300308
0
0.300305
0
0.300302
0
0.300299
0
0.300296
1.044
0.300293
0
0.300291
0
0.300288
0
0.300285
0
0.300282
0
0.300279
0
0.300276
0
0.300273
0
0.300271
0
0.300268
0
0.300265
0
0.300262
0
0.300259
0
0.300256
0
0.300253
0
0.300251
0
0.300248
0
0.300245
0
0.300242
0
0.300239
0
0.300236
0
0.300233
0
0.30023
0
0.300228
0
0.300225
0
0.300222
0
0.300219
0
0.300216
1.859
0.300213
0
0.30021
0
0.300208
0
0.300205
0
0.300202
0
0.300199
0
0.300196
0
0.300193
0
0.30019
0
0.300188
0
0.300185
0
0.300182
0
0.300179
0
0.300176
0
0.300173
0
0.30017
0
0.300167
0
0.300165
0
0.300162
0
0.300159
0
0.300156
0
0.300153
0
0.30015
0
0.300147
0
0.300145
0
0.300142
0
0.300139
0
0.300136
0
0.300133
0
0.30013
0
0.300127
0
0.300125
end of experiment
